Zeiss GeminiSEM 500
This dedicated SEM system is a Zeiss Gemini 500 column using a Schottky thermal field emitter filament for imaging between 0.1 and 30 kV for sub-nanometer resolution imaging. The system can also vary the pressure within the sample chamber to mitigate for charging of non-conductive samples.
Images can be taken with the following detectors or combinations thereof, all to achieve optimal imaging of a wide array of samples with high contrast and minimal sample damage.
Our tool is equipped with the following detectors:
- 4-Channel Backscatter electron detector (BSD): Provides compositional contrast imaging and topographical imaging. Often used for failure analysis of metals.
- Inlens SE: For topography. Great for low voltage imaging, minimally invasive.
- Secondary electron detector (SE2): For topography imaging at higher voltages
- Bruker EDS: X-ray detector for spot identification of the composite materials of a sample