Oxygen Plasma Etcher – PE-50


  • The PE-50 is a plasma treatment tool with a maximum power output of 300 watts.
  • It has a power supply of 13.56 MHz RF with an automatic RF matching unit. The power is much higher than in the equipment brochure (link below), and is continuously variable with digital display (0-300W).
  • This unit can use up to two gases simultaneously (currently configured with oxygen only).
  • It is used to remove organic and inorganic contamination, increase wettability, increase bond strength, and remove residue.

Download the Oxygen Plasma Etcher – PE-50 Brochure (PDF version, 306 KB)

Image of the oxygen plasma etcher