Through the purchase of a membership, internal or external clients can obtain unlimited access to the NanoFab facilities and equipment within our three labs including tool training provided by a lab technologist.
Minimum charge of 1 hour or 1 run.
Internal (uOttawa)
- A quote will be provided prior to beginning the work. A FOAP is required for payment of the final invoice via journal entry.
External – Academic and Non-Academic
- A quote will be provided prior to beginning the work. Payment of the final invoice can be made via cheque or wire transfer.
Service
Option
|
Description of Service (all services include technologist time)
|
Cost/Unit (CDN)
|
---|
1
|
SEM imaging Raith Pioneer or GeminiSEM 500
|
$40/hour
|
---|
2
|
E-beam lithography Raith Pioneer
|
To be negotiated
|
---|
3
|
Chambered sample processing ex. Etching, Rapid Thermal Annealing System Includes process gases
|
$30/hour
|
---|
4
|
Metal deposition Angstrom Nexdep Evaporator Includes common metals (precious metals - $1.30/nm)
|
$100/run
|
---|
5
|
Wet processing ex. Glovebox, Electroplating System
Includes common consumables
|
$40/hour
|
---|
6
|
Metrology work ex. AFM, Elipsometer, Metricon, Profilometer
|
$40/hour
|
---|
7
|
Photolithography work ex. Mask Aligner
|
$40/hour
|
---|
8
|
Post-processing and sample preparation ex. Wire bonding, Solder reflow, Sputtering Includes common metals (precious metals - $1.30/nm)
|
$40/hour
|
---|
9
|
ORION NanoFab inspection / microscopy
|
$60/hour
|
---|
10
|
ORION NanoFab processing
|
To be negotiated
|
---|