Internal and external clients can hire one of our qualified lab technologists to complete lab work on their behalf at an hourly rate. We offer fee-for-service on all of our tools.

Please send an email to the NanoFab Administrative Assistant with the following details:

  • Name
  • Company / Organization
  • Please provide:
    • a short description of the work you would like to complete
    • the timeframe for when you are looking to complete your work
    • the maximum amount of time you are willing to invest in the project
  • Please attach a PDF to your email with more information if necessary

Price List

Through the purchase of a membership, internal or external clients can obtain unlimited access to the NanoFab facilities and equipment within our three labs including tool training provided by a lab technologist.

Minimum charge of 1 hour or 1 run.

Internal (uOttawa)

  • A quote will be provided prior to beginning the work. A FOAP is required for payment of the final invoice via journal entry.

External – Academic and Non-Academic

  • A quote will be provided prior to beginning the work. Payment of the final invoice can be made via cheque or wire transfer.
Description of Service
(all services include technologist time)
Service Unit Cost/unit 
   Internal (UofO) ClientsExternal, Academic ClientsExternal, Non-Academic Clients
1SEM imaging
Raith Pioneer or Gemini500
2Electron beam lithography
Raith Pioneer
RunTo be negotiatedTo be negotiatedTo be negotiated
3Chambered sample processing
ex. Etching, Rapid Thermal Annealing System
Includes process gases
4Metal deposition
Angstrom Nexdep Evaporator
Includes common metals (precious metals - $1.90/nm)

Wet processing
ex. Glovebox, etching

Includes common consumables

6Metrology work
ex. AFM, Elipsometer, Metricon, Profilometer
7Photolithography work
ex. Mask Aligner, resist processing
8Post-processing and sample preparation
ex. Wire bonding, Solder reflow, Sputtering
Includes common metals (precious metals - $1.90/nm)
9Ga ion beam milling for cross-section imaging and/or HE ion beam microscopy, ORION NanofaHour80160320
10Ga or He ion beam milling for nanofabrication, ORION NanofabRunTo be negotiatedTo be negotiatedTo be negotiated

NanoFab Fees

Image of the exterior of ARC created with a helium ion beam

Orion NanoFab HIM/FIB

Image taken via AFM

Atomic Force Microscope (AFM)

Image of a tri-layer photolithography stack with a flake broken off revealing its thickness

Scanning Electron Microscope (SEM)