Through the purchase of a membership, internal or external clients can obtain unlimited access to the NanoFab facilities and equipment within our three labs including tool training provided by a lab technologist.
Minimum charge of 1 hour or 1 run.
Internal (uOttawa)
- A quote will be provided prior to beginning the work. A FOAP is required for payment of the final invoice via journal entry.
External – Academic and Non-Academic
- A quote will be provided prior to beginning the work. Payment of the final invoice can be made via cheque or wire transfer.
Service
Option
|
Description of Service (all services include technologist time)
|
Service Unit
|
|
Cost/unit |
|
---|
|
|
|
Internal (UofO) Clients |
External, Academic Clients |
External, Non-Academic Clients |
---|
1
|
SEM imaging Raith Pioneer or Gemini500
|
Hour |
40 |
80 |
240 |
---|
2
|
Electron beam lithography Raith Pioneer
|
Run |
|
|
|
---|
3
|
Chambered sample processing ex. Etching, Rapid Thermal Annealing System Includes process gases
|
Hour
|
40 |
80 |
240 |
---|
4
|
Metal deposition Angstrom Nexdep Evaporator Includes common metals (precious metals - $1.50/nm)
|
Run
|
100 |
200 |
300 |
---|
5
|
Wet processing ex. Glovebox, etching
Includes common consumables
|
Hour
|
40 |
80 |
240 |
---|
6
|
Metrology work ex. AFM, Elipsometer, Metricon, Profilometer
|
Hour
|
40 |
80 |
240 |
---|
7
|
Photolithography work ex. Mask Aligner, resist processing
|
Hour
|
40 |
80 |
240 |
---|
8
|
Post-processing and sample preparation ex. Wire bonding, Solder reflow, Sputtering Includes common metals (precious metals - $1.50/nm)
|
Hour
|
40 |
80 |
240 |
---|
9
|
Ga ion beam milling for cross-section imaging and/or HE ion beam microscopy, ORION Nanofa
|
Hour
|
80 |
160 |
320 |
---|
10
|
Ga or He ion beam milling for nanofabrication, ORION Nanofab
|
Run
|
To be negotiated |
To be negotiated |
To be negotiated
|
---|
NanoFab Fees