Scientist doing work at a computer wearing a hair net

Fee-for-Service

Internal and external clients can hire one of our qualified lab technologists to complete lab work on their behalf at an hourly rate. We offer fee-for-service on all of our tools.

Please send an email to the NanoFab Administrative Assistant with the following details:

  • Name
  • Company / Organization
  • Please provide:
    • a short description of the work you would like to complete
    • the timeframe for when you are looking to complete your work
    • the maximum amount of time you are willing to invest in the project
  • Please attach a PDF to your email with more information if necessary

Price List

Through the purchase of a membership, internal or external clients can obtain unlimited access to the NanoFab facilities and equipment within our three labs including tool training provided by a lab technologist.

Minimum charge of 1 hour or 1 run.

Internal (uOttawa)

  • A quote will be provided prior to beginning the work. A FOAP is required for payment of the final invoice via journal entry.

External – Academic and Non-Academic

  • A quote will be provided prior to beginning the work. Payment of the final invoice can be made via cheque or wire transfer.

Service
Option

Description of Service
(all services include technologist time)

Service Unit

   Cost/unit  
      Internal (UofO) Clients External, Academic Clients External, Non-Academic Clients

1

SEM imaging
Raith Pioneer or Gemini500

 Hour 40 80 240

2

Electron beam lithography
Raith Pioneer

 Run

To be negotiated

To be negotiated

To be negotiated

3

Chambered sample processing
ex. Etching, Rapid Thermal Annealing System
Includes process gases

Hour

 40 80 240

4

Metal deposition
Angstrom Nexdep Evaporator
Includes common metals (precious metals - $1.50/nm)

Run

 100 200 300

5

Wet processing
ex. Glovebox, etching

Includes common consumables

Hour

 40 80 240

6

Metrology work
ex. AFM, Elipsometer, Metricon, Profilometer

Hour

 40 80 240

7

Photolithography work
ex. Mask Aligner, resist processing

Hour

 40 80 240

8

Post-processing and sample preparation
ex. Wire bonding, Solder reflow, Sputtering
Includes common metals (precious metals - $1.50/nm)

Hour

 40 80 240

9

Ga ion beam milling for cross-section imaging and/or HE ion beam microscopy, ORION Nanofa

Hour

 80 160 320

10

Ga or He ion beam milling for nanofabrication, ORION Nanofab

Run

 To be negotiated To be negotiated

To be negotiated

NanoFab Fees

Image of the exterior of ARC created with a helium ion beam

Orion NanoFab HIM/FIB

Image taken via AFM

Atomic Force Microscope (AFM)

Image of a tri-layer photolithography stack with a flake broken off revealing its thickness

Scanning Electron Microscope (SEM)

Need help with microfabrication costs?

CMC Microsystems offers MNT Financial Assistance to help academic researchers meet their micro-nano R&D goals. This competitive award program is intended to lower the barriers associated with conducting custom microfabrication at labs across Canada.
Apply today!