Mask Aligner - OAI Model 204IR
- This manual mask aligner is capable of frontside and backside alignment (using transmitted IR light).
- The aligner has soft contact, hard contact, and vacuum contact modes.
- The tool has a 350 Watt I-line near-UV lamp calibrated to 20 mW/cm2 intensity at I-line (365 nm).
- The two alignment microscopes have a minimum separation of 48 mm and a field of view of approximately 300 microns. Frontside alignment accuracies on the order of 1-2 microns are possible.
Download the Mask Aligner - OAI Model 204IR Brochure (PDF version, 2,122 KB)